International Symposium On Plasma And Process-Induced Damage: 1996-2001 Proceedings

 International Symposium on Plasma and Process-Induced Damage: 1996-2001 Proceedings PDF ePub book

This work covers topics such as: damage measurement; plasma characterization and damage mitigation; non-volatile memories; ultra-thin dielectrics; contamination; and multi-terminal effects....

CD-ROM: 5 pages
Publisher: IEEE (October 1, 2001)
Language: English
ISBN-10: 0965157768
ISBN-13: 978-0965157766
Product Dimensions: 5.5 x 0.5 x 4.8 inches
Format: PDF ePub fb2 djvu ebook

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